Tungsten Filaments for Electron Microscopy

Created by Kathleen Patrick, Modified on Tue, 3 Sep at 11:24 AM by Kathleen Patrick

Tungsten hairpin filaments are the standard type filaments widely used in Scanning Electron Microscopes, Transmission Electron Microscopes and Microprobe systems. Tungsten filaments are also called cathodes or electron emitters or electron sources. The high quality filaments we offer are made to the original equipment manufacturer's specifications using special tools to guarantee the correct shape for the filaments and to generate the optimum electron beam. The filaments are annealed in vacuum, stress-free and precisely aligned before they are shipped. Please consult the list below for the correct type of filament for your SEM, TEM, or EPMA.


The tungsten filaments are manufactured from high grade tungsten. Of all metals in pure form, tungsten has the highest melting point (3422°C), the lowest vapour pressure at temperatures above 1650°C and has the highest tensile strength. Tungsten also has the lowest coefficient of thermal expansion of any pure metal. This combination of properties makes tungsten the ideal material.


Electron Microscopy Filaments

Base TypeFilamentBase TypeFilament
AEIZEISS (DSM & TEM)
LEO (1450 & TEM)
TESCAN
FEI/PHILIPSAMRAY (except 1200)
JEOL K-typeISI/ABT/TOPCON
2-prong
HITACHI S-typeISI/ABT/TOPCON 3-prong
HITACHI in cartridge
ETEC


Electron Source Performance Comparison

Emitter TypeThermionicThermionicSchottky FECold FE
Cathode materialW
LaB6
ZrO/W (100)
W(310)
Operating temperature [K]2,800
1,900
1,800
300
Cathode radius [nm]60,000
10,000
< 1,000
< 100
Effective source radius [nm]15,000
5,000
15 (*)
2.5(*)
Emission current density [A/cm2]3305,30017,000
Total emission current [µA]200802005
Normalized brightness [A/cm2.sr.kV]1.1041.1051.1072.107
Maximum probe current [nA]10001000100.2
Energy spread @ cathode [eV]0.590.400.310.26
Energy spread @ gun exit [eV]1.5 - 2.51.3 - 2.50.35 - 0.70.3 - 0.7
Beam noise [%]1115 - 10
Emission current drift [%/h]0.10.2< 0.55
Operating vacuum hPa/mbar< 1.10-5< 1.10-6< 1.10-8< 1.10-10
Typical Cathode life [h]100> 1000> 5000> 2000
Cathode regenerationnot requirednot requirednot requiredevery 6 to 8 hours
Sensitivity to external influenceminimalminimallowhigh

* virtual source


Dimensions for EM Filament Bases (for Tungsten/Lab6) Filaments?

Base TypeDiameter of Ceramic discDiameter of PinsCenter Distance of Pins
AEI12.0mm1.0mm6.45mm
FEI/PHILIPS26.0mm1.0mm5.0mm
JEOL K-type28.0mm1.2mm8.0mm
HITACHI S-type9.8mm1.2mm2.7mm
ZEISS (DSM & TEM)
LEO (1450 & TEM)
TESCAN
19.8mm1.0mm5.0mm
AMRAY (except 1200)26.1mm1.0mm5.0mm
ISI/ABT/TOPCON
2 pins
23.3mm1.2mm11.9mm
ISI/ABT/TOPCON23.4mm1.2mm12.0mm



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