Sputter Coater, KQ150GB

The KQ150GB is single platform for sputtering and carbon rod evaporation. Metal evaporation using filament or boat sources is possible using an optional insert.

Depending upon user preference, the KQ150GB can be a top‐of‐the‐range sputter coater for high resolution scanning electron microscopy (SEM), or a high vacuum carbon coater suitable for SEM and transmission electron microscopy (TEM). The flexibility of the system can be further expanded using a range of optional accessories.

The KQ150GB can rapidly sputter a wide selection of oxidising and non‐oxidising metals making it ideal for many thin film applications.

The KQ150GB has an integral turbomolecular pump and additionally requires a suitable rotary pump or dry pump to "back" the turbomolecular pump (see Option and Accessories).

Flexible modular design

A modular design enables the vacuum chamber to be mounted through the base of the glove box or ‐ when modification to the glove box floor is not possible ‐ inside the glove box (optional feedthroughs are required).

A separate power supply housed in a rugged case is designed to be floor mounted and can be positioned conveniently beneath the glove box or bench. The touch screen user interface is housed in a robust stainless steel case and can be positioned outside of the glove box environment, if preferred.

Options for glove box mounting:

Vacuum module mounted in the floor of the glove box
A cut‐out is made in the floor of the glove box and the vacuum chamber fitted and sealed with the gasket supplied. External connections from the floor mounted power supply, vacuum pump and argon gas can then be made directly to the chamber.

Or

Vacuum module placed inside the glove box
The chamber assembly is placed inside the glove box and the power supply, vacuum pump and argon gas connections are made through two KF40 feedthroughs in the rear of the glove box.

Note: each KQ150GB is supplied with an accessory/configuration kit to suit either internally or externally mounted vacuum chambers. Additional kits can be designed on a case‐by‐case basis to allow the system to be adapted to various manufacturers' glove boxes. Please contact Quorum for more details.

Touch screen user interface

Enclosed in a stainless steel case and mounted at a convenient position outside the glove box, the touch screen allows multiple users to input and store coating protocols.

Vacuum module ‐ including "vacuum shutdown" and glove box pressure interlock

The vacuum module houses all the working components, including the efficient 70L/s air‐cooled turbomolecular pump. An automatic bleed control ensures optimum vacuum conditions during sputtering and a full range active gauge is fitted as standard to monitor the vacuum.

The KQ150GB includes "vacuum shutdown", a convenient feature which enhances vacuum performance by allowing the chamber vacuum to be maintained when the coater is not in use.

A unique feature of the KQ150GB is the integral pressure interlock switch. This independently monitors the pressure inside the glove box and shuts off the vacuum pump if the glove box atmosphere is unacceptably reduced due to a vacuum leak.

The vacuum chamber is 214mm high to allow for increased source to substrate distances required for coating large specimens. It has an external diameter of 165mm and comes with an integral implosion guard. The chamber assembly is easily removed to allow specimen exchange and chamber cleaning.

A variable speed rotary specimen stage is fitted as standard, with full height adjustment from 0 to 190mm above the base plate; other stages are available as options.

Sputter coating and carbon coating as standard, plus an option for metal evaporation

"Intelligent" Quick‐change deposition inserts

The deposition inserts can be swapped in seconds and the intelligent system logic automatically recognises which insert is in place and displays the appropriate operating settings.

High resolution sputter coating

The KQ150GB features a high‐resolution sputter coater insert (10034) for oxidising and non‐oxidising (noble) metals. A wide selection of sputtering targets is available, including iridium and chromium, which are highly recommended for FE‐SEM applications. Please see Options and Accessories for details of available metal targets.

Carbon rod evaporation

The high vacuum carbon rod coating insert (10033) is ideal for the production of highly stable carbon films and surface replicas for transmission electron microscopy (TEM). The system uses economical 3.05mm diameter carbon rods and the advanced "anti‐stick" carbon rod evaporation gun offers simple operation and reproducible results.
A carbon fibre evaporation insert (10455) is available as an option (see Options and Accessories).

Metal evaporation/aperture cleaning option

A quick change insert (10457) allows metal evaporation from tungsten baskets or molybedenum boats ‐ ideal for thin film applications. For ease of set up in a glove box, the metal charge can be loaded into the evaporation source away from the vacuum chamber.

Each of the above configurations can be used with a range of optional accessories. See options and Accessories for details.

Rapid data entry

At the operational heart of KQ150GB is a simple colour touch screen, which allows even the most inexperienced or occasional operators to rapidly enter and store their own process data. To further aid ease of use a number of typical sputtering and evaporation profiles are provided.

KQ150GB mounted in a glove box