Comparative sputter data for Iridium and other materials on K575X sputter coater.
Samples were coated using an Emitech K575X Sputter Coater and were examined using a Hitachi S-5200 Field Emission SEM. Pictures are courtesy of Linda Dailey, Emitech Products Inc.
Gold | |||
Magnification | 15,000X | 100,000X | 300,000X |
Coating Time: | 10 seconds | 10 seconds | 10 seconds |
Current Used: | 20 mA | 20 mA | 20 mA |
Gold/Palladium | |||
Magnification | 15,000X | 100,000X | 300,000X |
Coating Time: | 10 seconds | 10 seconds | 10 seconds |
Current Used: | 20 mA | 20 mA | 20 mA |
Chromium | |||
Magnification | 15,000X | 100,000X | 300,000X |
Coating Time: | 30 seconds | 30 seconds | 30 seconds |
Current Used: | 100 mA | 100 mA | 100 mA |
Iridium | |||
Magnification | 15,000X | 100,000X | 300,000X |
Coating Time: | 10 seconds | 10 seconds | 10 seconds |
Current Used: | 20 mA | 20 mA | 20 mA |
No Coating | |||
Magnification | 15,000X | 100,000X | 300,000X |
Coating Time: | N/A | N/A | N/A |
Current Used: | N/A | N/A | N/A |
Platinum | |||
Magnification | 15,000X | 100,000X | 300,000X |
Coating Time: | N/A | N/A | N/A |
Current Used: | N/A | N/A | N/A |
Magnifications provided are indicative and will vary with reproduction and monitor size used.
Comparative sputtered films using the Q150T Turbo-Pumped Sputter Coater/Carbon Coater (Au, Pt, Ir and Cr)
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